CF series ultra high vacuum flapper valve (pneumatic)

  • 2-6 CF系列超高真空挡板阀(气动)


This valve is suitable for breaking pipeline in ultra-high vacuum system, and it is pneumatically driven. It has the advantages of stable operation, reliable operation, good sealing performance and long service life. It is one of the preferred valves for ultra-high vacuum equipment. Pneumatic valve is powered by compressed air to open or close the valve plate. When the air source is lost, the valve plate will automatically close by spring force. The medium of the valve is air and a few corrosive gases.


• Standardized and modular design, easy to replace and maintain;

• Easy to clean design;

• The shaft seal is bellows seal, other seals are fluororubber, no lubricant design;

• The valve body is welded in stainless steel with small leakage rate;

Main performance index

• Scope of application: 1 × 10-6Pa~1.2 × 105Pa

• Differential pressure on valve plate when opening: ≤ 1.2 × 105Pa in any direction

• Leakage rate of valve body and valve seat: < 1.3 × 10-7Pa·L·s-1

• Number of first maintenance cycles: 800000

• Baking temperature of valve body: ≤ 200 ℃ when opening; ≤ 150 ℃ when closed

• Installation position: any

• Power supply: AC 220V 50Hz, 6W or DC 24V, 3W (special specifications can be customized)

• Compressed air: 0.4 ~ 0.7MPa

• Valve opening and closing time: ≤ 1s

• Valve position indication: pneumatic drive: with on-off position indication switch (magnetic switch)

2-6 CF系列超高真空挡板阀(气动)

2-6 CF系列超高真空挡板阀(气动)


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