Rectangular ultra high vacuum gate valve

  • 7 矩形超高真空插板阀


This series of valves are pneumatically driven, with reasonable structure design, beautiful appearance, smooth action, small impact vibration, reliable use, good sealing performance and long service life. It is one of the preferred valves for vacuum equipment automation in semiconductor industry. The valve is driven by compressed air to push the cylinder. The connecting rod mechanism is pushed (pulled) by the transmission rod. The driving body moves along the axial direction. The driving body is connected with the valve plate through the swing rod and drives the valve plate to open and close. The medium of the valve is air and non corrosive gas.


• Multi swing rod evenly distributed support structure is adopted, the force of valve plate is uniform, the impact vibration of valve opening is small, and the noise is low;

• Four roller supporting motion mechanism, smooth motion and low motion noise;

• The dynamic seal adopts bellows seal, and other seals are fluororubber, so the seal is reliable;

• The valve body is welded in stainless steel with small leakage rate;

• On the smaller volume, more workpieces can be passed at one time, and the space can be used reasonably.

Main performance index

• Scope of application: 1 × 10-6Pa~1.2 × 105Pa

• The pressure difference on the plug-in board when opening: ≤ 2 × 103pa in any direction

• Leakage rate of valve body and valve seat: < 1.3 × 10-7Pa·L·s-1

• First maintenance cycle: 100000 times

• Baking temperature of valve body: ≤ 150 ℃

• Installation position: the driving body is horizontal or vertical

• Power supply: AC 220V 50Hz 6W or DC 24V 3W (special specifications can be customized)

• Compressed air: 0.5-0.7mpa

• Valve opening or closing time: according to the nominal diameter

• Valve position indication: with on-off position indication switch (magnetic switch)

• Valve weight: according to different nominal diameter

7 矩形超高真空插板阀

7 矩形超高真空插板阀


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