Ultra high vacuum adjustable gate valve

  • 1 超高真空可调式插板阀


The valve is a control plug-in valve with stepping motor. It is reasonable in structure design, beautiful in appearance, and has the advantages of high precision, reliable use and long service life. It can be widely used in ultra-high vacuum equipment that needs to adjust the opening of the valve to control the flow. Driven by the driving torque of stepping motor, the valve pushes (pulls) the connecting rod mechanism through the driving rod to move along the axial direction with the driving body. The driving body is connected with the valve plate through the swing rod or steel ball to complete the opening and closing action of the valve plate. The valve acts as a throttling element, and the drive is completed by the driver, stepping motor and controller. The controller provides a position control mode, which allows the control valve to open and close at any position at a selected speed. The power control can also be adjusted manually. When the power control is used, it is controlled by pulse signal, with fast speed and accurate positioning. The medium of the valve is air and non corrosive gas.


• The shaft seal is bellows seal, other seals are fluororubber, no lubricant design;

• The valve body is welded in stainless steel with small leakage rate;

• The valve body adopts stiffener structure, with small volume, light weight and beautiful appearance;

• Double guide rail bearing roller mechanism is adopted for smooth movement; Valve plate integral structure, uniform support force;

• It is driven by stepping motor, and the opening position of the valve plate can be adjusted at will, which can be used to adjust the flow.

Main performance index

• Scope of application: 1 × 10-6Pa~1.2 × 105Pa (the cover plate is sealed with fluorine rubber ring)

• The pressure difference on the plug-in board when opening: ≤ 3 × 103pa in any direction

• Leakage rate of valve body and valve seat: < 1.3 × 10-7Pa·L·s-1

• First maintenance cycle: 10000 times

• Baking temperature of valve body: ≤ 200 ℃ when opening; ≤ 150 ℃ when closed

• Installation position: any

• Power supply: AC 220V 50Hz or DC below 50V, the maximum current is 5.5A

• Valve opening or closing time: adjustable

• Valve position indication: full close, full close position indication switch (micro switch), other positions are controlled by pulse

• Valve weight: see weight manual

1 超高真空可调式插板阀

1 超高真空可调式插板阀


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